規格:

·  彩色或黑白系統

·  (600x600x150*) mm, (900x1200x150*) mm, (1200x1500x150*) mm

·  U2xy= 3.5+L/250 µm

·     U1z= 3.0+L/250 µm

·  XY Repeatability 3.5 µm

·  Z    Repeatability 3.0 µm

·  Magnification ~15x-400x

  raise to 300mm (Option)
  base on Type 4000 Series